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Products Peripheral Equipment 947 Co2 bubbler

947 Co2 bubbler


Introduction:

ADT 947 Co2 bubbler Inline Injector (CO2 Bubbler) is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.



System highlights

Tabletop design

Back film removal & collection mechanism

Heating stage plate (temperature controlled)

Built-in vacuum generator

Customizable

Handles all tape types and frame types (up to 300mm)

Robust design


Options

Extended resistivity setting range

Alarm Buzzer



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